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Silizium-Planartechnologie (1 Angebot) 1. Technologische Grundprozesse.- 1.1 Die Planartechnologie des Silizium.- 1.2 Mikrolithographie.- 1.3 Thermische Oxidation des Silizium.- 1.4 Diffusion.- 1.5 Reinigung der Siliziumoberfläche.- 1.6... |
Vieweg & Teubner 9783519004677 |
€ 35,50*
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